| Home | << 1 >> |
|
| Record | |||||
|---|---|---|---|---|---|
| Author | Bogaerts, A. | ||||
| Title | Effects of oxygen addition to argon glow discharges: a hybrid Monte Carlo-fluid modeling investigation | Type | A1 Journal article | ||
| Year | 2009 | Publication | Spectrochimica acta: part B : atomic spectroscopy | Abbreviated Journal | Spectrochim Acta B |
| Volume | 64 | Issue | 11/12 | Pages | 1266-1279 |
Keywords  |
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT) | ||||
| Abstract | A hybrid model is developed for describing the effects of oxygen addition to argon glow discharges. The species taken into account in the model include Ar atoms in the ground state and the metastable level, O2 gas molecules in the ground state and two metastable levels, O atoms in the ground state and one metastable level, O3 molecules, Ar+, O+, O2+ and O− ions, as well as the electrons. The hybrid model consists of a Monte Carlo model for electrons and fluid models for the other plasma species. In total, 87 different reactions between the various plasma species are taken into account. Calculation results include the species densities and the importance of their production and loss processes, as well as the dissociation degree of oxygen. The effect of different O2 additions on these calculation results, as well as on the sputtering rates, is discussed. | ||||
| Address | |||||
| Corporate Author | Thesis | ||||
| Publisher | Place of Publication | Oxford | Editor | ||
| Language | Wos | 000272910300016 | Publication Date | 2009-10-23 | |
| Series Editor | Series Title | Abbreviated Series Title | |||
| Series Volume | Series Issue | Edition | |||
| ISSN | 0584-8547; | ISBN | Additional Links | UA library record; WoS full record; WoS citing articles | |
| Impact Factor | 3.241 | Times cited | 39 | Open Access | |
| Notes | Approved | Most recent IF: 3.241; 2009 IF: 2.719 | |||
| Call Number | UA @ lucian @ c:irua:79271 | Serial | 869 | ||
| Permanent link to this record | |||||