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| Author | Ke, X.; Bals, S.; Romo Negreira, A.; Hantschel, T.; Bender, H.; Van Tendeloo, G. | ||||
| Title | TEM sample preparation by FIB for carbon nanotube interconnects | Type | A1 Journal article | ||
| Year | 2009 | Publication | Ultramicroscopy | Abbreviated Journal | Ultramicroscopy |
| Volume | 109 | Issue | 11 | Pages | 1353-1359 |
| Keywords | A1 Journal article; Electron microscopy for materials research (EMAT) | ||||
| Abstract | A powerful method to study carbon nanotubes (CNTs) grown in patterned substrates for potential interconnects applications is transmission electron microscopy (TEM). However, high-quality TEM samples are necessary for such a study. Here, TEM specimen preparation by focused ion beam (FIB) has been used to obtain lamellae of patterned samples containing CNTs grown inside contact holes. A dual-cap Pt protection layer and an extensive 5 kV cleaning procedure are applied in order to preserve the CNTs and avoid deterioration during milling. TEM results show that the inner shell structure of the carbon nanotubes has been preserved, which proves that focused ion beam is a useful technique to prepare TEM samples of CNT interconnects. | ||||
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| Publisher | Place of Publication | Amsterdam | Editor | ||
| Language | Wos | 000270765800006 | Publication Date | 2009-07-11 | |
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| ISSN | 0304-3991; | ISBN | Additional Links | UA library record; WoS full record; WoS citing articles | |
| Impact Factor | 2.843 | Times cited | 21 | Open Access | |
| Notes | Esteem 026019; Iap | Approved | Most recent IF: 2.843; 2009 IF: 2.067 | ||
| Call Number | UA @ lucian @ c:irua:79074 | Serial | 3485 | ||
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